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Pt/Ta/SiO2 film on SiN-coated Si

Based on

3 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum

Type Single Compound
Formula Ta
Role layer
2

platinum

Type Single Compound
Formula Pt
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
resistivity dependent on platinum layer thickness

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • tantalum
  • Si wafer
Product

Pt/Ta/SiO2 film on SiN-coated Si

Thickness: 1 nm

Thickness: ~ 2 - ~ 7 nm

Medium: none

Support: Si wafer

Method 2

Type: Physical formation
Source:
Starting materials
  • tantalum
  • carborundum/silicon
  1. jNG4lPOE8wlVBO0H5bdw7IE
Product

Pt/Ta/SiO2 film on SiN-coated Si

Thickness: 10 nm

Thickness: 60 nm

Medium: none

Support: carborundum/silicon

Method 3

Type: Physical formation
Source:
Starting materials
  • tantalum
  • carborundum/silicon
  1. 9tNQ2ze5tHa71iUV7MWtjBc
Product

Pt/Ta/SiO2 film on SiN-coated Si

Thickness: 10 nm

Thickness: 60 nm

Medium: none

Support: carborundum/silicon

Method 4

Type: Physical formation
Source:
Starting materials
  • tantalum
  • silicon nitride/silicon
  1. mXJmu33qpQI7VFpjdA56COX
Product

Pt/Ta/SiO2 film on SiN-coated Si

Thickness: 10 nm

Thickness: 60 nm

Medium: none

Support: silicon nitride/silicon

Method 5

Type: Physical formation
Source:
Starting materials
  • tantalum
  • silicon nitride/silicon
  1. EfrRvRvk4BwrnbDZGU3ijUK
Product

Pt/Ta/SiO2 film on SiN-coated Si

Thickness: 10 nm

Thickness: 60 nm

Medium: none

Support: silicon nitride/silicon

References

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