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grating structure

Based on

5 Articles
2018 Most recent source

Composition

1

chromium

Type Single Compound
Formula Cr
Role layer
2

Vacuous

Type
Formula
Role layer
3

silver

Type Single Compound
Formula Ag
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical resistance

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Sensor properties

Type of sensor Sensor property Nanomaterial Variant Source
temperature sensor in substrate for adhesion

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Applications

Area Application Nanomaterial Variant Source
diagnostics

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • chromium
  1. th0XplfeQ7goKbAPVkrawLEMNubF96VemEzWJm9d9bKKUNVt8g
Product

grating structure

Hole depth: ~ 550 nm

Hole diameter: ~ 490 nm

Periodicity: ~ 700 nm

Post diameter: ~ 340 nm

Post height: ~ 260 nm

Thickness: 15 nm

Thickness: 550 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • chromium
  1. wg63xBHO91SmoXhu3ISCnyH4yeMJcSVIFw7goq0H5QYSEwNeKrnN4rKhQ
Product

grating structure

Thickness: 100 nm

Thickness: 3 nm

Medium: none

Support: 3M VHB 4910 elastomer

Method 3

Type: Physical formation
Source:
Starting materials
  • poly(ethylene terephthalate)
  1. eQ2XRyp3vIMSucQTUfVoOqcrCL1KBWEYura28XE7d
Product

grating structure

Thickness: 100 nm

Thickness: 3 nm

Medium: none

Support: poly(ethylene terephthalate)

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon
  • chromium
Product

grating structure

RMS roughness: 5.842 nm

Thickness: 5 nm

Thickness: ~ 100 nm

Medium: none

Support: silicon

References

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