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SiO2/SiGe/Si3N4/SiO2/Si3N4

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
3

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
4

polycrystalline-SiGe

poly-Si0.85Ge0.15 poly-SiGe
Type Single Compound
Formula Si0.85Ge0.15
Role layer
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role partial layer

References

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