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solidly mounted resonator

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

molybdenum-silica bilayer

Type Complex Compound
Formula
Role layer
2

platinum

Type Single Compound
Formula Pt
Role layer
3

aluminium nitride

aluminum nitride
Type Single Compound
Formula AlN
Role layer
4

gold

Type Single Compound
Formula Au
Role layer
5

titanium

Type Single Compound
Formula Ti
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
frequency shift

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Applications

Area Application Nanomaterial Variant Source
analysis methods

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  • molybdenum
Product

solidly mounted resonator

Thickness: 10 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon
  • molybdenum
Product

solidly mounted resonator

Thickness: 15 nm

Medium: none

Support: silicon

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon
  • molybdenum
Product

solidly mounted resonator

Thickness: 20 nm

Medium: none

Support: silicon

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon
  • molybdenum
Product

solidly mounted resonator

Thickness: 5 nm

Medium: none

Support: silicon

Method 5

Type: Physical formation
Source:
Starting materials
  • silicon
  • molybdenum
Product

solidly mounted resonator

Thickness: 10 nm

Medium: none

Support: silicon

References

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