Loading ...

SiO2/PS-OH/ZEP520

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

SiOx substrates silicic oxide fused quartz fused silica SiO2 glass silica
Type Single Compound
Formula SiO2
Role layer
2

mono-hydroxyl-terminated polystyrene

PS-OH
Type Polymer
Formula
Role layer
3

poly(methyl-α-chloroacrylate-co-α-methylstyrene)

ZEP520
Type Polymer
Formula
Role layer

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

More information/entries available to subscribers only.

Or, view sample content

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. A3PKWbojQEAUYIUhTnaN
Product

SiO2/PS-OH/ZEP520

Pattern pitch: 44.6 nm

Thickness: 2 - 3 nm

Thickness: 3 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  1. u5iP0OZ
Product

SiO2/PS-OH/ZEP520

Pattern pitch: 54 nm

Thickness: 3 nm

Thickness: 40 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  1. zBSoebi
Product

SiO2/PS-OH/ZEP520

Pattern pitch: 35.2 nm

Thickness: 3 nm

Thickness: 30 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  1. PXu2iJoMOuhxv3WaOPQ7
Product

SiO2/PS-OH/ZEP520

Pattern pitch: 31.4 nm

Thickness: 2 - 3 nm

Thickness: 3 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
Starting materials
  1. d98WKBxbyNdrum6x6JGX
Product

SiO2/PS-OH/ZEP520

Pattern pitch: 38.6 nm

Thickness: 2 - 3 nm

Thickness: 3 nm

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:


Sign up for a free trial