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nanoporous Pd thin film on silicon substrate

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous silicon dioxide

amorphous silicic oxide amorphous silica
Type Single Compound
Formula SiO2
Role layer
2

amorphous silicon nitride

silicon nitride a-Si3N4
Type Single Compound
Formula Si3N4
Role layer
3

tantalum

Type Single Compound
Formula Ta
Role layer
4

palladium

Type Single Compound
Formula Pd
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
average in-plane stress

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Applications

Area Application Nanomaterial Variant Source
sensors (excluding biosensors)

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
  1. NFpjiweGdBqSSaQ7
  2. oJRpwAweZzLiRsbFeRcSZHH3
  3. V2z
  4. nQTXBBAx5CA4oQPRa0L5FIYSRE2qUQZUcNYjq
Product

nanoporous Pd thin film on silicon substrate

Pore size: 5 - 7 nm

Thickness: 10 nm

Thickness: 100 - 110 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: crystalline silicon

Method 2

Type: Chemical synthesis
Source:
  1. pROoam0L7uCjFPUl
  2. d4lrQJKMkaVQk5GvoGyJPSfb
  3. vcG
  4. FluD8VY1MFSwnk0WdFooR8XCcRhZ5iUFoe7W6
Product

nanoporous Pd thin film on silicon substrate

Crack size: 10 - 50 nm

Pore size: ~ 10 nm

Thickness: 10 nm

Thickness: 100 - 110 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: crystalline silicon

Method 3

Type: Chemical synthesis
Source:
  1. I5VGSy1WY12YjIgj
  2. bhWX3DVUx2CGiGH0xv7fOKhP
  3. KTZVT
  4. ceoQEY8RJ7dzVldNyUeSTzR8WKZm1ZtJqy9vd
Product

nanoporous Pd thin film on silicon substrate

Pore size: 5 - 7 nm

Thickness: 10 nm

Thickness: 100 - 110 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: crystalline silicon

Method 4

Type: Chemical synthesis
Source:
  1. 3FFGUD11FJSDCRhj
  2. 0M8vgGeTJmqYiBoxBaDuteLM
  3. K0i
  4. YDJKrCAPRk3rstAgfVVe8Ab1XpwGNgcJWFXzQ
Product

nanoporous Pd thin film on silicon substrate

Crack size: 10 - 50 nm

Pore size: ~ 10 nm

Thickness: 10 nm

Thickness: 100 - 110 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: crystalline silicon

References

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