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SiGe nanopillar

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

Si0.85Ge0.15

Type Complex Compound
Formula
Role layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Preparation

Method 1

Type: Physical formation
Source:
Product

SiGe nanopillar

Thickness: 20 - 60 nm

Thickness: 5 nm

Width: 100 nm

Medium: none

Support: silicon nitride on silica

Method 2

Type: Physical formation
Source:
Product

SiGe nanopillar

Thickness: 20 - 60 nm

Thickness: 5 nm

Width: 50 - 100 nm

Medium: none

Support: silicon nitride on silica

References

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