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HfZrO2/SiO2 film

Based on

1 Articles
2012 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

hafnium zirconate

Type Single Compound
Formula HfZrO2
Role layer

Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • water
  • p-doped silicon
  1. nhl4xx
Product

HfZrO2/SiO2 film

Thickness: 1.3 nm

Thickness: 2.9 nm

Medium/Support: none

References

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