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ordered array of nanoporous silicon nanopillars

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

highly boron p-doped silicon

highly boron-doped silicon
Type Complex Compound
Formula
Role layer
2

gold

Type Single Compound
Formula Au
Role partial layer
3

nanoporous silicon nanopillars

Type Nano Material
Formula
Role partial layer

Applications

Area Application Nanomaterial Variant Source
energy storage

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • photoresist
  • highly boron p-doped silicon
Product

ordered array of nanoporous silicon nanopillars

Thickness: 20 nm

Thickness: 6300 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • photoresist
  • highly boron p-doped silicon
Product

ordered array of nanoporous silicon nanopillars

Thickness: 20 nm

Thickness: 4300 nm

Thickness: ~ 7500 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • photoresist
  • highly boron p-doped silicon
Product

ordered array of nanoporous silicon nanopillars

Thickness: 1200 nm

Thickness: 1600 nm

Thickness: 20 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • photoresist
  • highly boron p-doped silicon
Product

ordered array of nanoporous silicon nanopillars

Thickness: 20 nm

Thickness: ~ 100 - ~ 300 nm

Thickness: ~ 15000 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
Starting materials
  • photoresist
  • highly boron p-doped silicon
Product

ordered array of nanoporous silicon nanopillars

Thickness: 20 nm

Thickness: ~ 14500 nm

Thickness: ~ 60 - ~ 250 nm

Medium/Support: none

References

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