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Al2O3/Sc2O3 high-κ nanolayer

Based on

1 Articles
2014 Most recent source


Image only illustrates the order and placement of components as described in literature.


scandium (III) oxide

scandium(III) oxide scandium oxide scandia
Type Single Compound
Formula Sc2O3
Role layer

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role layer


Method Nanomaterial Variant Source
X-ray fluorescence spectroscopy

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