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SRN/Si3N4 multilayer nanostructure

Based on

1 Articles
2012 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous silicon nitride

silicon nitride a-Si3N4
Type Single Compound
Formula Si3N4
Role layer
2

Si-rich silicon nitride

silicon-rich nitride silicon nitride Si-rich nitride a-SiNx SRN
Type Single Compound
Formula SiN(x)
Role layer

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • n-doped silicon
  • nitrogen
  1. AZEfK
  2. elbIsj9uGNDousuo6wRCfl3IAfiFVecpYmFAg
Product

SRN/Si3N4 multilayer nanostructure

Thickness: 3.5 nm

Medium: none

Support: n-doped silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • quartz
  • nitrogen
  1. IfwoO
  2. RVN9wItuL1yhqez0DRmx0ybxz2JSt3m1H7zeS
Product

SRN/Si3N4 multilayer nanostructure

Thickness: 3.5 nm

Medium: none

Support: quartz

References

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