Loading ...

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia a-HfO2 HfO2
Type Single Compound
Formula HfO2
Role layer
3

RuOx nanocrystals

Type Nano Material
Formula
Role layer
4

amorphous aluminium oxide

amorphous aluminum oxide aluminium(III) oxide amorphous alumina aluminium oxide amorphous Al2O3 aluminum oxide alumina a-Al2O3
Type Single Compound
Formula Al2O3
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
series capacitance

More information available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

More information/entries available to subscribers only.

Or, view sample content

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. WGEQ6O
  2. mb1GKnMZNZQ2mpfkRjGSFGgx
Product

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Thickness: ~ 1 nm

Thickness: ~ 17 nm

Thickness: ~ 3 nm

Thickness: ~ 3.5 nm

Medium: none

Support: n-type Si

Method 2

Type: Physical formation
Source:
Starting materials
  1. ECpVbaR
  2. 61LoHzGvGU0aavTfhWu8FKOi
Product

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Thickness: ~ 1 nm

Thickness: ~ 17 nm

Thickness: ~ 4 nm

Medium: none

Support: n-type Si

Method 3

Type: Physical formation
Source:
Starting materials
  1. XjyvN1
  2. 9a0KChHi4PLNPP7zv4JR6qhG
Product

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Thickness: ~ 1 nm

Thickness: ~ 17 nm

Thickness: ~ 3.5 nm

Thickness: ~ 4 nm

Medium: none

Support: n-type Si

Method 4

Type: Physical formation
Source:
Starting materials
  1. RyRWJ4
  2. wYoUgYo6B9ekzwaHUAQvhQZp
Product

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Thickness: ~ 1 nm

Thickness: ~ 17 nm

Thickness: ~ 3 nm

Thickness: ~ 3.5 nm

Medium: none

Support: n-type Si

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial