Loading ...

SiO2/HfO2/RuOx/Al2O3 film on n-type Si

Based on

1 Articles
2011 Most recent source


Image only illustrates the order and placement of components as described in literature.


silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia a-HfO2 HfO2
Type Single Compound
Formula HfO2
Role layer

ruthenium suboxide

ruthenium oxide
Type Single Compound
Formula RuO(x)
Role layer

amorphous aluminium oxide

amorphous aluminum oxide aluminium(III) oxide amorphous alumina aluminium oxide amorphous Al2O3 aluminum oxide alumina a-Al2O3
Type Single Compound
Formula Al2O3
Role layer


Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

More information available to subscribers only.

Or, view sample content


Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial