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Based on

18 Articles
4 Patents
2018 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium nitride

aluminum nitride
Type Single Compound
Formula AlN
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
hardness

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • aluminium nitride
  • 4H-silicon carbide
  1. TMwuiwM
Product

AlN film

Thickness: 5 nm

Medium: none

Support: 4H-silicon carbide

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • trimethyl aluminum
Product

AlN film

Thickness: ~ 54 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • trimethyl aluminum
Product

AlN film

Thickness: ~ 60 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • trimethyl aluminum
Product

AlN film

Thickness: ~ 42 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • trimethyl aluminum
Product

AlN film

Thickness: 60 nm

Medium/Support: none

References

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