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SiNx membrane

Based on

50 Articles
3 Patents
2018 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
50-nt ssDNA individual translocation event count dependent on applied voltage

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Catalytic properties

Reaction Value Nanomaterial Variant Source
hydrogen evolution reaction under light illumination

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Applications

Area Application Nanomaterial Variant Source
analysis methods

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Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • dichlorosilane
  1. iAYoaBmzO39CRrjThe
Product

SiNx membrane

Thickness: 100 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  1. 3jOgZgmlLt5VFqhdKDfEc22PWihjxu4
Product

SiNx membrane

Hole array pitch: 5000 nm

Hole diameter: ~ 4 nm

Thickness: 50 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
Product

SiNx membrane

Pore diameter: 5.5 nm

Thickness: 50 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
Product

SiNx membrane

Pore diameter: 3 nm

Pore thickness: 10.3 nm

Thickness: 50 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon nitride
  1. fsie80LSi8LRJRsYAF
Product

SiNx membrane

Thickness: ~ 7 nm

Medium/Support: none

References

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