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SiNx membrane

Based on

301 Articles
31 Patents
2018 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
50-nt ssDNA individual translocation event count dependent on applied voltage

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Catalytic properties

Reaction Value Nanomaterial Variant Source
hydrogen evolution reaction under light illumination

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Applications

Area Application Nanomaterial Variant Source
analysis methods

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Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • dichlorosilane
  1. IHCXKOcXGW2jfhX1Zn
Product

SiNx membrane

Thickness: 100 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
Product

SiNx membrane

Pore diameter: 7.6 nm

Thickness: 50 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Product

SiNx membrane

Edge: 49000 nm

Thickness: ~ 45 nm

Thin region diameter: 3400 nm

Well bottom thickness: 15 - 22 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
Product

SiNx membrane

Pore diameter: 5.5 nm

Thickness: 50 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
Starting materials
Product

SiNx membrane

Pore diameter: 2.8 nm

Thickness: 50 nm

Medium/Support: none

References

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