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nanopatterned silicon on silica

Based on

6 Articles
2018 Most recent source

Composition

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

crystalline silicon

c-Si cSi
Type Single Compound
Formula Si
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
critical power

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Applications

Area Application Nanomaterial Variant Source
tools/devices

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Characterization

Method Nanomaterial Variant Source
focused ion beam

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
  1. lY1KUanPbzBOAv
Product

nanopatterned silicon on silica

Hole periodicity: 500 nm

Thickness: 2000 nm

Thickness: 320 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
  1. 3ci8tUGpxuOawO
Product

nanopatterned silicon on silica

Hole periodicity: 500 nm

Thickness: 2000 nm

Thickness: 320 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
  1. t8upvMye5xpoUt
Product

nanopatterned silicon on silica

Hole periodicity: 500 nm

Thickness: 2000 nm

Thickness: 320 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
  1. 9nh2HgvQigpqdZ
Product

nanopatterned silicon on silica

Hole periodicity: 500 nm

Thickness: 2000 nm

Thickness: 320 nm

Medium/Support: none

References

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