Loading ...

AlN thin film

Based on

9 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium nitride

aluminum nitride hcp-AlN h-AlN
Type Single Compound
Formula AlN
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
deflection

More information/entries available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
coatings

More information/entries available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
X-ray diffraction

More information/entries available to subscribers only.

Or, view sample content

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
Product

AlN thin film

Grain size: 5 - 20 nm

Thickness: 200 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. fFQNZdydGaJ49Ysj8Sj
  2. MyN8I42TKZSGwYTi
  3. 2EjgrNijhTvzcnlbLmqb9o6zPwAEQ
Product

AlN thin film

Column width: < 100 nm

Roughness: 1.20 - 1.38 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
  1. wm8GtlBMWxYZpjVXH
Product

AlN thin film

Crystallite size: ~ 150 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. 4FXCdrtLvuqLcJmngwd
  2. 2GJ8aVyKMZ2RfXNNT
  3. jnTzNVRUBcWfgj5DmHSx4aNiKtIc
Product

AlN thin film

Column width: < 100 nm

Roughness: 3.88 - 3.98 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. jGuCf8xSMwbBHk8Mekm
  2. LKXeWUy8Jv7q8jBeE
  3. KEoluttQcLMavfsZlu2MRVPAIrHgz
Product

AlN thin film

Column width: < 100 nm

Roughness: 0.90 - 1.06 nm

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:


Sign up for a free trial