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AlN thin film

Based on

10 Articles
2018 Most recent source

Composition

1

aluminium nitride

aluminum nitride hcp-AlN h-AlN
Type Single Compound
Formula AlN
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
deflection

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Applications

Area Application Nanomaterial Variant Source
coatings

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Characterization

Method Nanomaterial Variant Source
X-ray diffraction

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethyl aluminum
Product

AlN thin film

Grain size: 5 - 20 nm

Thickness: 200 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. vPRuSv0jRLD0p3tbXzT
  2. 71GqP26sZ5w5liSQ
  3. 8vSeIq4qWxtCHwfe1BsTFBvPsj513
Product

AlN thin film

Column width: < 100 nm

Roughness: 1.20 - 1.38 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
  1. dimxx9FK7P1pwwsg0
Product

AlN thin film

Crystallite size: ~ 150 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. M9ERxNgswPxB8biTEDP
  2. niTIP0sIDxw65pF9M
  3. iXP7S0linweiqTHSNPEQQNC3mReb
Product

AlN thin film

Column width: < 100 nm

Roughness: 3.88 - 3.98 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. cTK4tmPJLD1OOFcgNUA
  2. 9zwmZa21N8fjEpdma
  3. DCvKqdoClMTxNKC9OUNTnCQU9Aa4a
Product

AlN thin film

Column width: < 100 nm

Roughness: 0.90 - 1.06 nm

Medium/Support: none

References

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