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nanostructured materials

Based on

1 Articles
2010 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

XHRiC-16 nanolayer

Type Nano Material
Formula
Role layer
2

photoresist layer

Type Nano Material
Formula
Role layer

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • XHRiC-16
  • silicon
  • photoresist
Product

nanostructured materials

Size: not specified

Medium: none

Support: silicon

References

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