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SixNy film on silicon

Based on

2 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role raw materials
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

Characterization

Method Nanomaterial Variant Source
photoluminescence

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  • ammonia
  • silicon hydride
Product

SixNy film on silicon

Thickness: 11400 nm

Thickness: ~ 60 nm

Medium/Support: none

References

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