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HfO2 thin film

Based on

4 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia m-HfO2
Type Single Compound
Formula HfO2
Role raw materials
2

arsenic

Type Single Compound
Formula As
Role dopant

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
adiabatic temperature change

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • hafnium tetrachloride
  • water
  • trimethyl aluminum
See all (4)
  1. c71nmx
Product

HfO2 thin film

Thickness: 10 nm

Medium: none

Support: TiN on Si substrate

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • hafnium tetrachloride
  • water
  • trimethyl aluminum
See all (4)
  1. PQlRL9
Product

HfO2 thin film

Thickness: 10 nm

Medium: none

Support: TiN on Si substrate

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • hafnium tetrachloride
  • tris(isopropyl-cyclopentadienyl)gadolinium
  • water
See all (4)
  1. Fidcum
Product

HfO2 thin film

Thickness: 10 nm

Medium: none

Support: TiN on Si substrate

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • hafnium tetrachloride
  • tris(isopropyl-cyclopentadienyl)gadolinium
  • water
See all (4)
  1. gPJxFs
Product

HfO2 thin film

Thickness: 10 nm

Medium: none

Support: TiN on Si substrate

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • hafnium tetrachloride
  • water
  • trimethyl aluminum
See all (4)
  1. 8l1LWX
Product

HfO2 thin film

Thickness: 10 nm

Medium: none

Support: TiN on Si substrate

References

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