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metal oxide semiconductor capacitor material

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium

aluminum
Type Single Compound
Formula Al
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
4

Ta52Rh48

Type Single Compound
Formula Ta52Rh48
Role layer
5

copper

Type Single Compound
Formula Cu
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
relative capacitance

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Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
  1. L4gJnt
Product

metal oxide semiconductor capacitor material

Thickness: 10 nm

Thickness: 220 - 230 nm

Thickness: 25 nm

Thickness: 500 nm

Medium/Support: none

References

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