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Si3N4/silicon frame

Based on

2 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role raw materials
2

silicon nitride

Type Single Compound
Formula Si3N4
Role layer

Characterization

Method Nanomaterial Variant Source
other

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  • silicon nitride
Product

Si3N4/silicon frame

Thickness: 50 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
Product

Si3N4/silicon frame

Thickness: 50 nm

Medium/Support: none

References

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