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copper/titanium zirconium nitride/silicon

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium zirconium nitride

Type Single Compound
Formula Ti0.95Zr0.05N0.76
Role layer
2

copper

Type Single Compound
Formula Cu
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
sheet resistance percentage dependent on annealing temperature

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Ti-Zr alloy
  • n-type silicon
  • nitrogen
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Product

copper/titanium zirconium nitride/silicon

Thickness: 60 nm

Medium: none

Support: n-type silicon

References

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