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on aluminium nitride/silicon substrate interdigital transducers-patterned Cr/Al thin film

Based on

1 Articles
2010 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium nitride

aluminum nitride AlN
Type Single Compound
Formula AlN
Role layer
2

interdigital transducers-patterned Cr/Al thin film

IDT finger patterned Cr/Al thin film IDT-patterned Cr/Al thin film
Type Nano Material
Formula
Role layer

Applications

Area Application Nanomaterial Variant Source
tools/devices

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • aluminium nitride
  • silicon
  1. JEhkogc12ZFGm1hddqr
  2. QZXfERwspFpO96TC07k5unUZBqUvgbLZs2RsO
Product

on aluminium nitride/silicon substrate interdigital transducers-patterned Cr/Al thin film

Size: not specified

Medium: none

Support: aluminium oxide

Method 2

Type: Physical formation
Source:
Starting materials
  • aluminium nitride
  • silicon
  1. uGKCbTT62HOS9jvn6Dx
  2. ykZlgHkzH4452eo9yQ6jOh6atodhIAbNTd6Vf
Product

on aluminium nitride/silicon substrate interdigital transducers-patterned Cr/Al thin film

Size: not specified

Medium: none

Support: silicon

References

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