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TiAlN/SiNx nanocomposite film, 20 at% Si

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

a-SiNx c-SiNx
Type Single Compound
Formula SiN(x)
Role binder
2

Ti0.7Al0.3N

Type Single Compound
Formula Ti0.7Al0.3N
Role fillers

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
hardness

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Applications

Area Application Nanomaterial Variant Source
coatings

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Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. ONu6FQY5
  2. 2bBUpg1FPXEV
  3. 3UgspXF
  4. DZkZjTb
  5. dQ1L3bmXptzr7Lc39GPAh
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. MHOEHatF
  2. eR3e9pGCqBZB
  3. bMZIk6z
  4. 2S3cski
  5. vUztvjOq0CoE2Tvaddm1q
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Crystallite size: ~ 11 - ~ 15 nm

Interfacial thickness: ~ 0.3 - ~ 0.5 nm

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. kGfoDMMH
  2. JqnOU5FQtCAX
  3. 0bqnmkX
  4. xOWuzBm
  5. JTLDfPu8qNdIc5zNB9WxG
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. W4zViZl2
  2. KVXg0lvBbSlg
  3. CtPqrMi
  4. nHvFCxd
  5. vieRndLGHqUb7H2MRJt4q
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. cV1Lk3F3
  2. xpdiH8rj4HpB
  3. ZM0OP5E
  4. CyDFuCQ
  5. U2gwcSwThjUvl8cQLWvrS
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

References

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