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Based on

52 Articles
2018 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
band energy diagram

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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X-ray photoelectron spectroscopy

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2
  1. DDE6dnj70I
Product

HfO2 film

Thickness: ~ 17 nm

Medium: none

Support: highly p-type doped silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
Product

HfO2 film

Thickness: 15 nm

Medium: none

Support: titanium nitride film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • copper
  • water
  1. ORTKF
  2. HHlCisawMDrFe59aPKQ
Product

HfO2 film

Thickness: 20 nm

Medium: none

Support: copper

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • oxygen
  • hafnium
Product

HfO2 film

Thickness: 20 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • water
  • ethyl(methyl)[tris[ethyl(methyl)amino]hafnio]amine
  1. OpHAe
Product

HfO2 film

Thickness: ~ 10 nm

Medium/Support: none

References

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