Loading ...

HfO2 film

Based on

50 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
band energy diagram

More information/entries available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
electronics

More information/entries available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

More information/entries available to subscribers only.

Or, view sample content

X-ray photoelectron spectroscopy

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. nAIYY7re9NElNRY7tZN
Product

HfO2 film

Grain size: ~ 10 nm

Thickness: 85 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • copper
  • water
  1. m7SFC
  2. 7CqUyFGCIz9KcijCsez
Product

HfO2 film

Thickness: 20 nm

Medium: none

Support: copper

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2
  1. jouzyqi3XG
Product

HfO2 film

Thickness: ~ 17 nm

Medium: none

Support: highly p-type doped silicon

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • water
  • ethyl(methyl)[tris[ethyl(methyl)amino]hafnio]amine
  1. pnIf2
Product

HfO2 film

Thickness: ~ 10 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  1. 1uJwFDN5zkTMvRIH
  2. QeUhxjMOLbfXXHiMZ3
Product

HfO2 film

Thickness: 35 - 45 nm

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial