Loading ...

carbon nanotubes on silicon microelectromechanical system

Based on

3 Articles
3 Patents
2015 Most recent source

Composition

1

silicon-on-insulator wafer

SOI wafer
Type Complex Compound
Formula
Role carriers
2

carbon nanotubes

CNT
Type Nano Material
Formula
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electric current dependent on annealing temperature

More information/entries available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
electronics

More information/entries available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
field emission scanning electron microscopy

More information/entries available to subscribers only.

Or, view sample content

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • n-type silicon
Product

carbon nanotubes on silicon microelectromechanical system

Diameter: 3000 nm

Height: 5000 nm

Spacing: 15000 nm

Medium: none

Support: n-type silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. l51Zcrj9E4Dauc8HyP
  2. 5KM0BWGuQ
Product

carbon nanotubes on silicon microelectromechanical system

Size: not specified

Medium: ethanol

Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  1. PnJNVMsJAiY2wOvHPN
  2. thMXGEe1C
Product

carbon nanotubes on silicon microelectromechanical system

Size: not specified

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  1. 7mV4UNUMfiCbEXb6NH
  2. 4O6SjXdtB
Product

carbon nanotubes on silicon microelectromechanical system

Size: not specified

Medium: none

Support: tin-doped indium oxide

Method 5

Type: Chemical synthesis
Source:
Starting materials
  1. ttlWLb3chkXFiF93doRC2vTaYGOP
  2. 6AFXI
  3. Hxx7VhihCRcJW6KoDhfByzeBbMtl6McW4GD7bfkv60Snp9yY7SkZ
  4. nB1bey
  5. l307wGdtzR03YSfVZGff76k17RvLKBMt9RmXplcPdRJBxrNMZUFn2NHFhAzKR3ZbnCvGGuuIhZCPm3dZtD7dE4MwX6
Product

carbon nanotubes on silicon microelectromechanical system

Size: not specified

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:


Sign up for a free trial