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SiN membrane

Based on

32 Articles
5 Patents
2018 Most recent source

Composition

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
(3,3) mechanical mode quality factor

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Sensor properties

Type of sensor Sensor property Nanomaterial Variant Source
compounds sensor for dsDNA

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Applications

Area Application Nanomaterial Variant Source
diagnostics

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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transmission electron microscopy
UV

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. GyUB2tvf80EYEWF3E00uhpZk8wPo
Product

SiN membrane

Pore diameter: 7 nm

Pore length: 21 nm

Thickness: 20 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. bZK377Qb3pKFX0dW1A5DMj1LVKrbXKz
Product

SiN membrane

Thickness: ~ 100 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. gDK
  2. nuPbb64OytDSIQ
  3. 1TI1pL
  4. GvTGKWu3sdfSqt
Product

SiN membrane

Pore diameter: 28.0 nm

Thickness: 20 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
Product

SiN membrane

Hole radius: 160 nm

Lattice period: 470 nm

Thickness: 100 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
Starting materials
Product

SiN membrane

Edge length: 100000 nm

Pore diameter: 7.10 nm

Thickness: 10 nm

Medium: none

Support: silicon

References

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