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InGaAs FinFET

Based on

1 Articles
2014 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

nickel monosilicide

nickel silicide
Type
Formula NiSix
Role
3

titanium

Type Single Compound
Formula Ti
Role adhesion layer
4

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role dielectric layer
5

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia HfO2
Type
Formula HfO2
Role
6

In0.53Ga0.47As film

Type Nano Material
Formula
Role channels
7

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia a-HfO2 HfO2
Type Single Compound
Formula HfO2
Role gate dielectrics
8

titanium

Type Single Compound
Formula Ti
Role adhesion layer
9

nickel

Type Single Compound
Formula Ni
Role source
10

nickel

Type Single Compound
Formula Ni
Role drain
11

nickel

Type Single Compound
Formula Ni
Role gate

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
drain current dependent on drain voltage

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • arsenic
  • indium
  • gallium
  1. BMHgKuq9gbaeuWK345
Product

InGaAs FinFET

Size: not specified

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • arsenic
  • indium
  • gallium
  1. M9sk53s2P1nKbEGRwa
Product

InGaAs FinFET

Size: not specified

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • arsenic
  • indium
  • gallium
  1. 7DTHTtr3QzRu3DfuIc
Product

InGaAs FinFET

Size: not specified

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • arsenic
  • indium
  • gallium
  1. cFIRKlVXiM0ObyB9MP
Product

InGaAs FinFET

Size: not specified

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • arsenic
  • indium
  • gallium
  1. iRBHON5o8NpxQyKFti
Product

InGaAs FinFET

Size: not specified

Medium/Support: none

References

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