Loading ...

piezoelectric membrane actuator

Based on

1 Articles
2011 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

silicon

Type Single Compound
Formula Si
Role membranes
4

yttria-stabilized zirconia

YSZ
Type Complex Compound
Formula
Role buffer layer
5

SRO

Type Single Compound
Formula SrRuO3
Role electrodes
6

lead zirconium titanate

lead zirconium titanate PZT
Type Complex Compound
Formula
Role piezoelectric layer
7

SRO

Type Single Compound
Formula SrRuO3
Role electrodes

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
dielectric constant

More information/entries available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
electronics

More information available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
optical microscopy

More information available to subscribers only.

Or, view sample content

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Size: not specified

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Size: not specified

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Size: not specified

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Size: not specified

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Size: not specified

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:


Sign up for a free trial