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capacitor

Based on

1 Articles
2013 Most recent source

Composition

1

Si/SiO2

Type Complex Compound
Formula
Role substrate
2

tantalum(III) nitride

tantalum nitride
Type Single Compound
Formula TaN
Role gate
3

erbium(III) oxide

erbium trioxide erbium oxide erbia
Type Single Compound
Formula Er2O3
Role gate dielectrics
4

aluminium

aluminum
Type Single Compound
Formula Al
Role electrodes

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
capacitance

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2
Product

capacitor

Size: not specified

Medium/Support: none

References

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