Loading ...

TiN resistors on Si substrate

Based on

1 Articles
2014 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role dielectric layer
3

titanium nitride layers

TiN layers
Type
Formula
Role
4

aluminium

aluminum
Type Single Compound
Formula Al
Role contacts

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
specific thermal resistance

More information/entries available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
electronics

More information available to subscribers only.

Or, view sample content

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
Product

TiN resistors on Si substrate

Size: not specified

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial