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silicon/aluminum/silica/aluminum nanorod array-based polarization generator

Based on

1 Articles
2017 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

aluminium

aluminum
Type
Formula Al
Role
3

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
4

aluminum nanorods

Al nanorods
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

Details in source

Size: not specified

Medium/Support: none

View data for this variant only

No matching record found

Applications

Area Application Nanomaterial Variant Source

metasurface polarization generator (MPG)

Size: not specified

Medium/Support: none

View data for this variant only

No matching record found

Characterization

Method Nanomaterial Variant Source

Size: not specified

Medium/Support: none

View data for this variant only

Size: not specified

Medium/Support: none

View data for this variant only

No matching record found

Preparation

No matching record found

Method 1

Type: Physical formation
Starting materials
  • silicon
  • aluminium
magnetron sputtering
1
magnetron sputtering
2
  • silicon dioxide
spin coating
3
  1. poly(methyl methacrylate) as photoresist
baking
4
spin coating
5
  1. Espacer
e-beam lithography
6
development
7
  1. methyl isobutyl ketone:2-propanol
Espacer removal
8
  1. water
rinsing
9
  1. 2-propanol
drying
10
  1. N2 flow
e-beam evaporation
11
  • aluminium
lift-off
12
Product

silicon/aluminum/silica/aluminum nanorod array-based polarization generator

Size: not specified

Medium/Support: none

View data for this variant only

References

Journal articles

Wu, Pin Chieh; Tsai, Wei-Yi; Chen, Wei Ting; Huang, Yao-Wei; Chen, Ting-Yu; Chen, Jia-Wern; Liao, Chun Yen; Chu, Cheng Hung; Sun, Greg; Tsai, Din Ping (2017)
Versatile Polarization Generation with an Aluminum Plasmonic Metasurface

Nano Lett., vol. 17, issue 1, pp 445 - 452


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