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silicon wafer coated with thin ALD TiO2 layer

Based on

1 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

n-type crystalline silicon

n-type c-Si
Type Complex Compound
Formula
Role raw materials
2

oxygen deficient titanium(IV) oxide

substoichiometric titanium oxide oxygen deficient titanium oxide oxygen-deficient titanium oxide substoichiometric titanate oxygen-deficient titania oxygen vacancy titania reduced titanium oxide oxygen-rich titania titanium sub-oxide oxidized titanium titanium suboxide reduced titania titanium oxide titanate titania
Type Single Compound
Formula TiOx
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
charge carrier lifetime

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Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • tetraisopropyl orthotitanate
  • n-type crystalline silicon
  1. 1bZcTMt
Product

silicon wafer coated with thin ALD TiO2 layer

Thickness: ~ 10.5 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • tetraisopropyl orthotitanate
  • n-type crystalline silicon
  1. O41Vm9o
Product

silicon wafer coated with thin ALD TiO2 layer

Thickness: ~ 7 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • tetraisopropyl orthotitanate
  • n-type crystalline silicon
  1. YdZOC1U
Product

silicon wafer coated with thin ALD TiO2 layer

Thickness: ~ 3.5 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • tetraisopropyl orthotitanate
  • n-type crystalline silicon
  1. UEC6JF2
Product

silicon wafer coated with thin ALD TiO2 layer

Thickness: ~ 1.8 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • tetraisopropyl orthotitanate
  • n-type crystalline silicon
  1. r0IilET
Product

silicon wafer coated with thin ALD TiO2 layer

Thickness: ~ 5.3 nm

Medium/Support: none

References

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