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hole array-perforated silicon membrane/aluminum pad structure

Based on

1 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hole array-perforated silicon membrane

Type Nano Material
Formula
Role raw materials
2

aluminium

aluminum
Type Single Compound
Formula Al
Role partial layer

Properties

General physical and chemical properties

Property Value Source
effective thermal conductivity

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Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. bknlD1ocyMkJ8xtmzN
Product

hole array-perforated silicon membrane/aluminum pad structure

Method 2

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. Qxi0u1NAZFhw4Byo4h
Product

hole array-perforated silicon membrane/aluminum pad structure

Method 3

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. 3coLVzZLeJ3Cyz3wgj
Product

hole array-perforated silicon membrane/aluminum pad structure

Method 4

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. bFayxN4SLr9EqIPpve
Product

hole array-perforated silicon membrane/aluminum pad structure

Method 5

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. 7zZqu6O85nZEdSCaaN
Product

hole array-perforated silicon membrane/aluminum pad structure

References

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