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Ru thin film on TiN substrate

Based on

1 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium oxynitride

Ti(O,N)x
Type Complex Compound
Formula
Role layer
2

ruthenium

Type Single Compound
Formula Ru
Role layer
3

oxygen

Type Single Compound
Formula O2
Role loaded material

Properties

General physical and chemical properties

Property Value Source
density

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Applications

Area Application Source
electrodes/electrolytes

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. hci88m
Product

Ru thin film on TiN substrate

References

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