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Hf0.5Zr0.5O2 film

Based on

3 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium zirconium oxide

Type Single Compound
Formula Hf0.5Zr0.5O2
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
double coercive field change

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Applications

Characterization

Method Nanomaterial Variant Source
X-ray diffraction

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
See all (4)
  1. cXKln5
Product

Hf0.5Zr0.5O2 film

Thickness: 9.2 nm

Medium: none

Support: TiN/SiO2/Si substrate

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • ozone
  • tetrakis(ethylmethylamido) zirconium
  1. yUIJSimXVeHE9e1I
Product

Hf0.5Zr0.5O2 film

Thickness: 9.2 nm

Medium/Support: none

References

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