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example of nano imprint master

Based on

1 Patents
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

polydimethylsiloxane

PDMS
Type Polymer
Formula
Role layer
2

aluminium

aluminum
Type Single Compound
Formula Al
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Properties

Applications

Area Application Source
tools/devices

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Characterization

Biological effects

Preparation

References

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