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SiO2/Si3N4 film

Based on

1 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silica/silicon nitride film

SiO2/Si3N4 film
Type Nano Material
Formula
Role layer
2

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Properties

General physical and chemical properties

Property Value Source
optical reflectance

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Applications

Area Application Source
photonics

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Characterization

Biological effects

Preparation

References

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