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Au, S1813-coated Si3N4 film

Based on

1 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

gold

Type Single Compound
Formula Au
Role layer
2

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
3

S1813 optical resist

Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon nitride
  • S1813 optical resist
Product

Au, S1813-coated Si3N4 film

Thickness: 10 nm

Thickness: 200 nm

Thickness: 2300 nm

Medium/Support: none

References

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