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omega-shaped nanowire tunnel

Based on

1 Patents
2011 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role core
2

epitaxial layer

Type Variant
Formula
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
4

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer
5

tantalum(III) nitride

tantalum nitride
Type Single Compound
Formula TaN
Role layer

Properties

Applications

Area Application Source

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Characterization

Biological effects

Preparation

References

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