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Ta3N5 film on Si

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum(V) nitride

tantalum nitride
Type Single Compound
Formula Ta3N5
Role layer
2

tantalum oxynitride

Type Single Compound
Formula TaON
Role layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

References

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