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SiNx/Al2O3/p+nn+-Si/W

Based on

1 Articles
2016 Most recent source

Composition

1

n-Si

Type Complex Compound
Formula
Role raw materials
2

n+-Si

Type Complex Compound
Formula
Role layer
3

tungsten

Type Single Compound
Formula W
Role layer
4

p+-Si

Type Complex Compound
Formula
Role layer
5

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role layer
6

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
current density

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Applications

Area Application Nanomaterial Variant Source
electrodes/electrolytes

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
Product

SiNx/Al2O3/p+nn+-Si/W

Thickness: 300 nm

Thickness: 40 nm

Thickness: 7 nm

Thickness: 70 nm

Thickness: ~ 299400 nm

Medium/Support: none

References

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