Loading ...

Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

dioctyl adipate-plasticized polystyrene-polydimethylsiloxane block copolymer spheres in silicon-rich antireflective coating/spin-on-carbon trenches

Based on

1 Articles
2016 Most recent source

Composition

1

spin-on-carbon

SOC
Type Complex Compound
Formula
Role raw materials
2

polystyrene-polydimethylsiloxane block copolymer spheres in polystyrene matrix

PS-PDMS BCP spheres in PS matrix
Type Nano Material
Formula
Role layer
3

dioctyl adipate

DOA
Type Single Compound
Formula C22H42O4
Role loaded material
4

silicon-rich antireflective coating

SiARC
Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
scanning transmission electron microscopy

More information available to subscribers only.

Or, view sample content

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Product

dioctyl adipate-plasticized polystyrene-polydimethylsiloxane block copolymer spheres in silicon-rich antireflective coating/spin-on-carbon trenches

Thickness: 35 nm

Thickness: 50 nm

Trench depth: ~ 35 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon
  • silicon-rich antireflective coating
  • spin-on-carbon
  1. DJHFpXXrC1CEV8zFnNMU0gHc
Product

dioctyl adipate-plasticized polystyrene-polydimethylsiloxane block copolymer spheres in silicon-rich antireflective coating/spin-on-carbon trenches

Thickness: 35 nm

Thickness: 50 nm

Trench depth: ~ 35 nm

Medium: none

Support: silicon

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial