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amorphous Si(ON)x overlay on Si

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

p-type Si

Type Complex Compound
Formula
Role raw materials
2

silicon-rich silicon oxide

amorphous silicon suboxide amorphous silicon oxide silicon-rich oxide silicon suboxide amorphous SiOx silicon oxide a-SiOx glass SRSO SiOx SRO
Type Single Compound
Formula SiO(x)
Role layer
3

silicon oxynitride

Type Complex Compound
Formula
Role layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Biological system Test details Source

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-type Si
  1. YyyEY3cHcyqbUUTBE6Q7xL6udQey6Za1fVtuAaTnI1K
Product

amorphous Si(ON)x overlay on Si

References

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