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ZEP photoresist/crosslinked polystyrene film/silicon

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role layer
2

crosslinked polystyrene

XPS
Type Polymer
Formula
Role partial layer
3

ZEP e-beam resist

ZEP 7000 ZEP
Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. NTz9nI3OUn55qXSsSjjY
Product

ZEP photoresist/crosslinked polystyrene film/silicon

Method 2

Type: Chemical synthesis
Source:
  1. EsuxEJw2EkhGy2dqJ2cp
Product

ZEP photoresist/crosslinked polystyrene film/silicon

Method 3

Type: Chemical synthesis
Source:
  1. Fdm75GeT78eEhmRow62C
Product

ZEP photoresist/crosslinked polystyrene film/silicon

Method 4

Type: Chemical synthesis
Source:
  1. 4ZKVxYvtgVsMPuy3E6Lp
Product

ZEP photoresist/crosslinked polystyrene film/silicon

Method 5

Type: Chemical synthesis
Source:
  1. VTaPbSGtwvvifwXqPlhE
Product

ZEP photoresist/crosslinked polystyrene film/silicon

References

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