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ZEP photoresist/crosslinked polystyrene film/silicon

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role layer
2

crosslinked polystyrene

XPS
Type Polymer
Formula
Role partial layer
3

ZEP e-beam resist

ZEP 7000 ZEP
Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. RFZHpM9KAfgo2EcpGWwG
Product

ZEP photoresist/crosslinked polystyrene film/silicon

Method 2

Type: Chemical synthesis
Source:
  1. 8yfXxZyTI0lvRv3Hu2zU
Product

ZEP photoresist/crosslinked polystyrene film/silicon

Method 3

Type: Chemical synthesis
Source:
  1. D8aKk9OApsBWAvlpBF43
Product

ZEP photoresist/crosslinked polystyrene film/silicon

Method 4

Type: Chemical synthesis
Source:
  1. uKcB3gFubI5YJDd4sWzF
Product

ZEP photoresist/crosslinked polystyrene film/silicon

Method 5

Type: Chemical synthesis
Source:
  1. 7AQBBIFjL7f5njDdH9r0
Product

ZEP photoresist/crosslinked polystyrene film/silicon

References

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