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silicon nitride film with perforated silicon insert

Based on

2 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

Type Single Compound
Formula Si3N4
Role raw materials
2

perforated silicon nanoparticles

perforated Si nanoparticles
Type Nano Material
Formula
Role loaded material

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
band gap

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Applications

Area Application Nanomaterial Variant Source
photonics

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Characterization

Method Nanomaterial Variant Source
electron energy-loss spectroscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Product

silicon nitride film with perforated silicon insert

Hole size: ~ 65 nm

Thickness: 50 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Product

silicon nitride film with perforated silicon insert

Hole diameter: ~ 65 nm

Thickness: 50 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Product

silicon nitride film with perforated silicon insert

Hole size: ~ 65 nm

Thickness: 50 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Product

silicon nitride film with perforated silicon insert

Hole size: ~ 65 nm

Thickness: 50 nm

Medium/Support: none

References

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